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ISS customizes the process for each customer’s wafers. After the engineering evaluation phase has been completed for new customers or new groups of material received from existing customers, a device name with a specific flow is assigned to the customer. This device name tells manufacturing exactly how to process this material. When ISS receives material to process it is sorted into two categories of Recycle or Reclaim and assigned to the customer device. The criteria for sorting to these two categories are based on several characteristics such as film type, backside and front side damage, etc. Sorting into these categories and assigning customer specific device names assures the customer will get the most usage from their material and assures it is processed correctly every time.
Reclaim:
•Reclaim is defined as wafers that may have multiple films and require aggressive removal process to the front and back surfaces. A cost-effective alternative to virgin test wafers.
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Recycle:
•Recycle is defined as “application specific processing” Customer provides information regarding specific films to be removed. Wafers are non-patterned and back surface treatment not required to meet customer specification. A cost-effective alternative to reclaim wafers.
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